关键词: 时栅角位移传感器, 多场耦合, 误差分析, 结构优化

Abstract: In response to the problem that traditional absolute angular displacement sensors overly rely on encoding technology and ultra-precision machining methods, this paper proposes a multi-loop angular displacement sensor with coupled multiple physical fields by using a combination of “positioning+measurement”. At the same time, the error characteristics of the sensor are analyzed through theoretical error derivation, intra-pole simulation error analysis and experimental error research. The sensor structure optimization plan is also proposed. Two sets of prototypes before and after the sensor optimization are made by using PCB technology and the experimental research is carried out. The results show that the measurement accuracy of the optimized sensor system improves from ±16.5″ to ±6.2″. This structure can fully utilize the advantages of the strong anti-interference ability of time-grating magnetic field and high accuracy of time-grating electric field, and has important application value. The sensor achieves the measurement of spatial quantities by measuring time quantities, and has excellent performance, especially suitable for use under complex working conditions.