重庆理工大学学报(自然科学) ›› 2023, Vol. 37 ›› Issue (7): 161-168.

• “精密工程测量技术与仪器”专栏 • 上一篇    下一篇

一种构建同源数字参考信号的电场式时栅信号处理方法

康成蓥,郭艳梅,于治成   

  1. (1.重庆理工大学 机械检测与装备技术教育部工程研究中心,重庆 400054; 2.时栅传感及先进检测技术重庆市重点实验室,重庆 400054; 3.合肥工业大学 仪器科学与光电工程学院,合肥 230009)
  • 出版日期:2023-08-15 发布日期:2023-08-15
  • 作者简介:康成蓥,男,硕士研究生,主要从事微纳测量与智能传感器研究,Email:15683550252@163.com;通信作者 于治 成,男,博士,助理研究员,主要从事传感技术与智能仪器研究,Email:yzc@cqut.edu.cn。

An electric field time-grating signal processing method for constructing homologous digital reference signals

  • Online:2023-08-15 Published:2023-08-15

摘要: 提出了一种电场式时栅信号相位变化测量的新方法。利用时栅感应信号频率固定 不变、相移 2π后回到相位初始点的特性,将基于高频脉冲的计数器作为时间测量尺,且时间测 量尺满量程测量时间等于感应信号周期变化时间,通过多重相位时钟采样对时间刻度进行了细 分。感应信号相位周期移动时,其对应时间测量尺上的读数呈现周期性变化。该方法基于时栅 感应信号的固有特点,避免了因构建实体参考信号导致的时间基准不一致、信号偏斜、边沿抖动 等造成的测量误差,以及对多重相位时钟采样性能的限制,进一步提升了测量稳定性和分辨率。 通过设计基于 FPGA芯片的时栅信号处理系统,并在 120对极的电场式圆时栅传感器上对该优 化方法进行了可行性测试,传感器稳定性达到 0.405″,较之前提升近 3倍,理论分辨率和实际分 辨率分别为 0.135″和 0.54″,较之前提升约 2倍。

关键词: 电场式时栅, 信号处理, 时间测量, 多相时钟采样

Abstract: This paper proposes a new method for measuring the phase change of electric field time-grating signals. This method uses the characteristics that the frequency of the time-grating induction signal is fixed and the signal returns to the initial phase point after the phase shift of 2π. The counter based on the high frequency pulse is used as the time measuring ruler, and the full range measurement of the ruler is equal to the periodic change time of the induction signal. The time scale is then subdivided by multiple phase clock sampling. When the phase of the signal moves periodically, the corresponding reading on the ruler changes periodically. Based on the inherent characteristics of the time-grating induction signal, this method avoids the measurement errors caused by the inconsistency of the time reference, signal skew and edge jitter in the construction of the entity reference signal, and also avoids the limitation of the sampling performance of the multi-phase clock, which further improves the measurement stability and resolution. By designing a time-grating signal processing system based on FPGA, a feasibility test of the optimized scheme is carried out on a 120-pole electric field circular time-grating sensor. The stability of the sensor reaches 0.405′′, which is nearly 3 times higher than before. The theoretical resolution and actual resolution are 0.135′′ and 0.54′′, which are about 2 times higher than before.

中图分类号: 

  • TH7